Detailed electrical characterization of 200 mm CMOS compatible GaN/Si HEMTs down to deep cryogenic temperatures

نویسندگان

چکیده

A detailed electrical characterization and transistor parameter extraction on 200 mm CMOS compatible GaN/Si HEMTs was performed down to deep cryogenic temperatures. The main parameters (threshold voltage Vth, low-field mobility ?0, subthreshold swing SS, source-drain series resistance Rsd) were extracted in linear region using the Y-function Lambert-W function methods for gate lengths 0.1 µm. method also employed saturation of velocity. results indicate that these HEMT devices demonstrate a very good functionality low temperature with improvement slope. It shown by TLM analysis Rsd is more limited contact than 2DEG access as lowered.

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ژورنال

عنوان ژورنال: Solid-state Electronics

سال: 2022

ISSN: ['0038-1101', '1879-2405']

DOI: https://doi.org/10.1016/j.sse.2022.108448